Concepedia

Comparison of structure and properties of SiOx coatings deposited by reactive pulsed magnetron sputtering (PMS) and by hollow cathode activated EB evaporation (HAD)

O. Zywitzki, Hagen Sahm, Mario Krug, H. Morgner, M. Neumann

Surface and Coatings Technology · 2000 · 19 citations · 11 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsSurface CoatingsThin-film DepositionThin-film MaterialsCoating CharacterizationFunctional CoatingsMagnetron SputteringSputteringThin-film Coatings

References

11

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Large area glass coating

Surface and Coatings Technology · 1999 · 178 citations

Natural Sciences, Materials Engineering, Materials Science +11

Deposition behavior of hexamethydisiloxane films based on the FTIR analysis of Si–O–Si and Si–CH3 bonds

Min Tae Kim · Thin Solid Films · 1997 · 134 citations

Natural Sciences, Materials Engineering, Materials Science +15

Functionalized coatings based on inorganic–organic polymers (ORMOCER®s) and their combination with vapor deposited inorganic thin films

Krystal Haas, Sabine Amberg‐Schwab, Klaus Rose et al. · Surface and Coatings Technology · 1999 · 133 citations

Natural Sciences, Chemistry, Materials Science +14

Deposition of SiO films from O2/HMDSO plasmas

Dirk Hegemann, U. Vohrer, Christian Oehr et al. · Surface and Coatings Technology · 1999 · 113 citations

Natural Sciences, Materials Engineering, Materials Science +14