Publication | Closed Access
Structural characterization of pulsed laser-deposited AlN thin films on semiconductor substrates
39
Citations
9
References
1997
Year
Materials ScienceAluminium NitrideStructural CharacterizationEngineeringApplied PhysicsLaser Processing TechnologySemiconductor SubstratesLaser-assisted DepositionThin FilmsPulsed Laser Deposition
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