Dielectric Response of<i>c</i>-Oriented SrBi₂Ta₂O₉Thin Films Observed with Interdigital Electrodes

Abstract

The dielectric properties of the c-oriented SrBi2Ta2O9 (SBT) thin films are investigated with interdigital surface electrodes. The films are grown directly on MgO (100) substrates by pulsed laser deposition. The typical values of dielectric constant and dissipation factor at 100 kHz for 100-nm-thick SBT films are estimated to be εr∼270 and tan δ∼0.011, respectively. We have also investigated the dependence of the dielectric properties on the thickness and crystalline quality of the film.