Concepedia

Reflectance-Increasing Coatings for the Vacuum Ultraviolet and Their Applications*

Peter H. Berning, G. Hass, R. P. Madden

Journal of the Optical Society of America · 1960 · 103 citations · 11 references

Concepts

TL;DR

The extreme ultraviolet reflectance of aluminum and the challenge of enhancing reflectance below 800 Å are reviewed, including aging effects. The study examines how high‑reflectance coatings influence the relative merit of vacuum ultraviolet monochromator designs. The authors evaluate MgF₂ and slightly absorbing single‑layer coatings for the EUV above 1100 Å, and describe a new air‑free apparatus for preparing and measuring such films. They find that single dielectric films can significantly boost aluminum reflectance in the EUV by preventing oxide growth, while two‑layer coatings offer only marginal improvement over single layers.

Abstract

The extreme ultraviolet reflectance of aluminum prepared under optimized conditions is reviewed, including a study of the aging parameters. The theory of reflectance-increasing films for the vacuum ultraviolet is discussed. It is shown that single dielectric films, in addition to preventing the growth of an oxide film, can have a surprisingly strong reflectance-increasing effect on aluminum in this spectral region. The use of MgF2 as a reflectance-increasing coating for the extreme ultraviolet above 1100 A is considered in some detail. It is pointed out that two-layer reflectance-increasing coatings on aluminum have only a very small advantage over single-layer coatings in the extreme ultraviolet. The usefulness of single slightly absorbing films as reflectance-increasing coatings is treated. The problem of increasing reflectance in the spectral region below 800 A is discussed. A new apparatus is described which allows the preparation and measurement of film samples without exposure to air. The effect of the new high-reflectance coatings on the relative merit of vacuum ultraviolet monochromator designs is considered.

References

11

The Theory of the Concave Grating

H. G. Beutler · Journal of the Optical Society of America · 1945

+14

266 citations

A Small Plane Grating Monochromator

W. G. Fastie · Journal of the Optical Society of America · 1952

+14

261 citations

Theory of the Concave Grating I*†

Takeshi Namioka · Journal of the Optical Society of America · 1959

+12

166 citations

Filmed Surfaces for Reflecting Optics*

G. Hass · Journal of the Optical Society of America · 1955

+14

159 citations

Reflecting Coatings for the Extreme Ultraviolet*

G. Hass, R. Tousey · Journal of the Optical Society of America · 1959

+22

151 citations