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Natural SciencesChemistryMaterials ScienceSurface ChemistrySurface ScienceThin FilmsChemical Vapor DepositionCoatingsPhotochemistrySurface ModificationSurface PhysicsThin-film MaterialsAtmospheric PressureAtmospheric Pressure Chemical Vapor DepositionChemical Vapor Deposition CoatingsChemical Vapor Deposition MaterialsChemical Vapor Deposition Precursors
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Elements of chemical reaction engineering
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Chemical vapour deposition of coatings
Kwang‐Leong Choy · Progress in Materials Science · 2003 · 1.6K citations
Natural Sciences, Materials Engineering, Materials Science +12
Photochemistry of small molecules
Richard P. Wayne · Nature · 1979 · 711 citations