Influence of gas flow rate and entry point on ion charge, ion counts and ion energy distribution in a filtered cathodic arc

Growth, microstructure, and mechanical properties of arc evaporated TiCxN1−x (0≤x≤1) films

Linnéa Karlsson, Lars Hultman, M.P. Johansson et al. · Surface and Coatings Technology · 2000 · 164 citations

Natural Sciences, Materials Engineering, Materials Science +12

Low-pressure, high-density plasma nitriding: mechanisms, technology and results

T. Czerwiec, H. Michel, E. Bergmann · Surface and Coatings Technology · 1998 · 163 citations

Natural Sciences, Materials Science, Physics +11

Influence of gas pressure and cathode composition on ion energy distributions in filtered cathodic vacuum arcs

Marcela Bilek, Phil Martin, David R. McKenzie · Journal of Applied Physics · 1998 · 91 citations · Full text

Natural Sciences, Materials Science, Physics +16

The effect of deposition conditions on the properties of TiN thin films prepared by filtered cathodic vacuum-arc technique

Beng Kang Tay, X. Shi, Haoqing Yang et al. · Surface and Coatings Technology · 1999 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +16

Low-energy cluster ion beam modification of surfaces

Isao Yamada · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 44 citations

Natural Sciences, Materials Science, Physics +12