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Homojunction and heterojunction silicon solar cells deposited by low temperature–high frequency plasma enhanced chemical vapour deposition

SemiconductorsElectrical EngineeringElectronic DevicesEngineeringSolar Cell StructuresApplied PhysicsSemiconductor Device FabricationPhotovoltaic DevicesChemical VapourChemical Vapor DepositionSolar CellsPlasma ProcessingPhotovoltaicsSolar Cell Materials