Concepedia

Characterization and optimization of mid-frequency plasma-enhanced chemical vapour deposited carbon films using response surface methodology

R. Wächter, A. Cordery

Diamond and Related Materials · 1997 · 11 citations · 8 references

DOI

Concepts

References

8

Statistics for Experimenters

Sidney Addelman, G. E. P. Box, W. G. Hunter et al. · Technometrics · 1979 · 6.5K citations

Low-Pressure, Metastable Growth of Diamond and "Diamondlike" Phases

John C. Angus, C. Hayman · Science · 1988 · 1.6K citations

, , +12

Synthetic diamond: Emerging CVD science and technology

Paul May · Endeavour · 1995 · 425 citations

, , +9

Structure and physical properties of plasma-grown amorphous hydrogenated carbon films

P Couderc, Y. Catherine · Thin Solid Films · 1987 · 249 citations

, , +11

Computer simulation of a carbon-deposition plasma in CH/sub 4/

A. Rhallabi, Y. Catherine · IEEE Transactions on Plasma Science · 1991 · 77 citations

, , +17