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Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering

Materials EngineeringMaterials ScienceMagnetismMaterial AnalysisEngineeringPhysicsSurface ScienceApplied PhysicsMagnetron SputteringIntrinsic StressMagnetic Thin FilmsThin FilmsH FilmsThin Film ProcessingMagnetic Medium