Publication | Closed Access
FTIR, AFM and PL properties of thin SiOx films deposited by HFCVD
40
Citations
15
References
2010
Year
Materials ScienceMaterial AnalysisEngineeringSurface ScienceApplied PhysicsThin Siox FilmsThin FilmsEpitaxial GrowthPl PropertiesChemical Vapor DepositionThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1