Combined microstructure x-ray optics

Multilayers are man-made microstructures which vary in depth and are now of sufficient quality to be used as x-ray, soft x-ray, and extreme ultraviolet optics. Gratings are man-made in-plane microstructures which have been used as optic elements for most of this century. Joining of these two optical microstructures to form combined microstructure optical elements has the potential for greatly enhancing both the throughput and the resolution attainable in these spectral ranges. The characteristics of these new optic elements will be presented and compared to the experiment with emphasis on the unique properties of these combined microstructures. The results reported are general in nature and not limited to the soft x-ray or extreme ultraviolet spectral domains and also apply to neutrons.