Computer Simulation Of The Cross-Sectional Morphology Of Thin Films

Abstract

Two macroscopic two-dimensional geometrical models have been developed to describe the cross-sectional morphology of thin films which exhibit columnar microstructure. Using simple geometrical assumptions and assumptions based on experimental results, these models trace the evolution of cone-like clusters from their point of nucleation within the film to their emergence at the top surface. The simulated films are then characterized by calculating their roughness as a function of film thickness for different input parameters.