Growth of high-quality GaAs/AlAs Bragg mirrors on patterned InP-based quantum well mesa structures

Abstract

We have investigated the regrowth of GaAs/AlAs quarter-wave Bragg reflectors on patterned mesa InP-based quantum well heterostructures that can be fabricated into 1.55 μm vertical cavity surface emitting lasers. It is seen from transmission electron and scanning electron microscopy that the multiple layer GaAs-based mirrors can be grown on InP-based heterostructure mesas of diameters 10–40 μm without noticeable propagation of defects into the reflector layers or the quantum well region below. At the same time the photoluminescence from the quantum wells after regrowth indicates that lasers can be fabricated.