Publication | Closed Access
High diffraction-efficiency molybdenum gratings for EUV lithography
12
Citations
7
References
2009
Year
Materials EngineeringMaterials ScienceEngineeringElectron-beam LithographyBeam LithographyOptical PropertiesEuv LithographyApplied PhysicsOptoelectronicsDiffractive Optic
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