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Effects of sputtering power on the properties of Al-doped ZnO films deposited on amorphous silicon films substrate

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsAmorphous SolidMicroelectronicsAl-doped Zno FilmsThin Film ProcessingAmorphous Silicon Films