Morphology of TiN thin films grown on SiO2 by reactive high power impulse magnetron sputtering - Concepedia

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Morphology of TiN thin films grown on SiO2 by reactive high power impulse magnetron sputtering

70

Citations

25

References

2011

Year

F. Magnus, Á.S. Ingason, O. B. Sveinsson, S. Ólafsson

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsTin Thin FilmsThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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