Concepedia

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Ion beam modification of structural and electrical properties of TiN thin films

DOI

14

Citations

8

References

2008

Year

M. Popović, Marijana Stojanović, D. Peruško, M. Novaković, I. Radović, V. Milinović, B. Timotijević, Miodrag Mitrić, M. Milosavljević
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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