Influence of spherical indentor radius on the indentation-induced transformation behaviour of silicon - Concepedia

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Influence of spherical indentor radius on the indentation-induced transformation behaviour of silicon

52

Citations

13

References

1995

Year

E.R. Weppelmann, J.S. Field, Michael V. Swain

Journal of Materials Science

EngineeringMicrofabricationMechanical EngineeringSolid MechanicsSemiconductor Device FabricationSpherical Indentor RadiusSilicon On InsulatorMechanics Of MaterialsIndentation-induced Transformation Behaviour

References

	Year	Citations

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