Electrical characteristics and growth kinetics in discharges used for plasma deposition of amorphous carbon - Concepedia

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Electrical characteristics and growth kinetics in discharges used for plasma deposition of amorphous carbon

140

Citations

27

References

1986

Year

Y. Catherine, P Couderc

Thin Solid Films

Materials ScienceElectrical CharacteristicsElectrical EngineeringAmorphous CarbonEngineeringGlow DischargeApplied PhysicsGas Discharge PlasmaNonthermal PlasmaGrowth KineticsPlasma ProcessingElectrical Insulation

References

	Year	Citations

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