A simple negative-ion sputter source - Concepedia

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A simple negative-ion sputter source

31

Citations

16

References

1978

Year

G. Caskey, R. A. Douglas, H. T. Richards, H. Vernon Smith

Nuclear Instruments and Methods

Electrical EngineeringEngineeringPhysicsAtomic PhysicsCosmic RayIon BeamInstrumentationMicroelectronics

References

	Year	Citations

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