Publication | Closed Access
Direct Current Heating Induced Giant Step Bunching and Wandering on Si(111) and (001) Vicinal Surfaces
43
Citations
10
References
1999
Year
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringPhysicsNanoelectronicsGiant Step BunchingSurface ScienceApplied PhysicsCondensed Matter PhysicsVicinal SurfacesSemiconductor MaterialSemiconductor Device FabricationStep BunchingAmorphous SolidSilicon On InsulatorMicroelectronics
Direct current (DC) heating induced giant step bunching and wandering on Si(111) and (001) vicinal surfaces were newly found. The step bunching and wandering are so large that they can easily be studied by optical microscopy. Temperature dependence of the DC heating effects and the dependence of such effects on the crystallographic direction of the current were studied.
| Year | Citations | |
|---|---|---|
Page 1
Page 1