Publication | Closed Access
Monte Carlo simulation of the electron beam scattering under gas mixtures environment in an HPSEM at low energy
26
Citations
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References
2009
Year
EngineeringElectron BeamPhysicsElectron SpectroscopyApplied PhysicsTransport PhenomenaElectron DiffractionMonte Carlo SimulationParticle Beam PhysicsElectron OpticBeam Transport SystemLow Energy
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