Discharge power dependence of structural and electrical properties of Al-doped ZnO conducting film by magnetron sputtering (for PDP) - Concepedia

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Discharge power dependence of structural and electrical properties of Al-doped ZnO conducting film by magnetron sputtering (for PDP)

56

Citations

6

References

2008

Year

Dong-Joo Kwak, Minwoo Park, Youl-Moon Sung

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsMagnetron SputteringDischarge Power DependenceAl-doped ZnoGas Discharge PlasmaThin Film Processing

References

	Year	Citations

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