Correlations between properties and applications of the CVD amorphous silicon carbide films - Concepedia

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Correlations between properties and applications of the CVD amorphous silicon carbide films

11

Citations

1

References

2001

Year

Irina Kleps, Anca Angelescu

Applied Surface Science

Materials ScienceMaterials EngineeringEngineeringApplied PhysicsThin Film Process TechnologyThin FilmsAmorphous SolidChemical Vapor DepositionThin Film ProcessingCarbide

References

	Year	Citations

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