Silicide formation in cobalt/amorphous silicon, amorphous CoSi and bias-induced CoSi films - Concepedia

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Silicide formation in cobalt/amorphous silicon, amorphous CoSi and bias-induced CoSi films

84

Citations

23

References

1997

Year

Jae Yeob Shim, Sang Wook Park, Hong Koo Baik

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringBias-induced Cosi FilmsSurface ScienceApplied PhysicsSiliceneSilicide FormationSemiconductor Device FabricationThin FilmsSilicon On InsulatorAmorphous SolidCobalt/amorphous SiliconThin Film Processing

References

	Year	Citations

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