Role of interparticle forces during stress-induced agglomeration of CMP slurries

Feng‐Chi Chang, Purushottam Kumar, Rohit Kumar Singh, Kannan Balasundaram, Jaeseok Lee, Jinhyung Lee, Rajiv K. Singh

Colloids and Surfaces A Physicochemical and Engineering Aspects · 2011 · 23 citations · 12 references

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