Effect of process parameters on the growth and properties of impurity-doped zinc oxide transparent conducting thin films by RF magnetron sputtering - Concepedia

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Effect of process parameters on the growth and properties of impurity-doped zinc oxide transparent conducting thin films by RF magnetron sputtering

19

Citations

33

References

2008

Year

Boen Houng, Chi Shiung Hsi, Bing Hou, Shen Fu

Materials ScienceMaterials EngineeringEngineeringProcess ParametersNanoelectronicsOxide ElectronicsIntrinsic ImpurityApplied PhysicsRf MagnetronSemiconductor MaterialThin FilmsMicroelectronicsThin Film Processing

References

	Year	Citations

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