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Effects of composition on optical and electrical properties of amorphous In–Ga–Zn–O films deposited using radio-frequency sputtering with varying O2 gas flows

Materials ScienceElectrical EngineeringOptical MaterialsEngineeringAmorphous In–ga–zn–o FilmsOptical PropertiesO2 Gas FlowsOptoelectronic MaterialsApplied PhysicsOxide ElectronicsThin Film Process TechnologyThin FilmsAmorphous SolidElectrical PropertiesOptoelectronicsThin Film Processing