27.2: Linear Source Deposition of Organic Layers for Full‐Color OLED

Abstract

Abstract A key requirement for fabrication of organic light emitting diode (OLED) displays is uniform film deposition over large areas because of the sensitivity of emission color and efficiency on film thickness. Conventional deposition using point sources is unattractive because of the requirement of a large source to substrate separation, usually with substrate rotation, to achieve acceptable thin film uniformity. By translating a novel extended linear evaporation source in a single direction, film non‐uniformity of less than 5% has been demonstrated over a 300 mm × 400 mm substrate with a source to substrate separation of 100 mm. OLEDs with all organic layers deposited using linear sources have been determined to operate identically to devices fabricated using conventional point sources. The performance of doped and undoped devices as well as the advantages of linear source deposition over conventional deposition techniques will be described.