A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology

Abstract

To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 °C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.