Publication | Closed Access
Analysis of X-ray rocking curves in (001) silicon crystals implanted with nitrogen by plasma immersion ion implantation
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Citations
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References
2000
Year
Materials ScienceIon ImplantationX-ray SpectroscopyEngineeringPhysicsSilicon CrystalsX-ray DiffractionApplied PhysicsSynchrotron RadiationCrystallographyX-ray OpticMicrostructureX-ray Fluorescence
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