Epitaxial growth of β-SiC by rf sputtering on silicon substrates and its porosity by electrochemical anodization - Concepedia

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Epitaxial growth of β-SiC by rf sputtering on silicon substrates and its porosity by electrochemical anodization

DOI Full Paper Access

14

Citations

8

References

2003

Year

Erqing Xie, Zhimin Zhang, Ziwei Ma, Hongfeng Lin, Deyan He

Optical Materials

Materials EngineeringMaterials ScienceSemiconductor TechnologyEngineeringElectrochemical AnodizationSurface ScienceApplied PhysicsSilicon SubstratesEpitaxial GrowthCarbide

References

	Year	Citations

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