Publication | Closed Access
Nanocrystalline silicon TFT process using silane diluted in argon–hydrogen mixtures
21
Citations
12
References
2008
Year
EngineeringNanomaterialsNanoelectronicsNanotechnologyApplied PhysicsSiliceneSemiconductor Device FabricationArgon–hydrogen MixturesChemistrySilicon On Insulator
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