Langmuir probe measurements in the negative glow of a sputtering DC discharge

Abstract

Radial and axial profiles of the density ne and temperature Te of the slow electron group have been studied in the negative glow of an abnormal discharge in a DC diode sputtering system, by Langmuir probes. The variations of ne and Te have been also studied as a function of discharge current and discharge pressure. The contamination of the probes has been examined.