Publication | Closed Access
Hydrogen-mediated epitaxy of Ag on Si(111) as studied by low-energy ion scattering
152
Citations
17
References
1991
Year
Materials ScienceSurface CharacterizationEpitaxial GrowthEngineeringPhysicsAg Thin FilmsSurface ScienceApplied PhysicsHydrogen-mediated EpitaxyHydrogen TerminationSiliceneSurface AnalysisThin FilmsSilicon On InsulatorMicroelectronicsMolecular Beam EpitaxyThin Film ProcessingLow-energy Ion
We have investigated the effect of the saturation of surface dangling bonds of Si(111) surfaces with atomic hydrogen upon Ag thin-film growth. By using time-of-flight-type low-energy ion scattering-recoil analysis techniques, we find that the growth mode of Ag thin films is drastically changed by the hydrogen termination of Si(111)-7\ifmmode\times\else\texttimes\fi{}7 surfaces and that the epitaxial growth of A-type Ag(111) films is promoted by the hydrogen atoms residing at the film/substrate interface.
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