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Mechanisms of intrinsic stress generation in amorphous carbon thin films prepared by magnetron sputtering

Materials ScienceMaterials EngineeringEngineeringGlassy CarbonPhysicsCarbon-based MaterialNanoelectronicsApplied PhysicsMagnetron SputteringIntrinsic Stress GenerationThin FilmsAmorphous SolidCarbon-based FilmsThin Film Processing