PECVD of hydrogenated diamond-like carbon films from CH4–Ar mixtures: growth chemistry and material characteristics - Concepedia

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PECVD of hydrogenated diamond-like carbon films from CH4–Ar mixtures: growth chemistry and material characteristics

19

Citations

9

References

2004

Year

G. Cicala, P. Bruno, Aurora M. Losacco

Diamond and Related Materials

Materials EngineeringMaterials ScienceChemical EngineeringMaterial CharacteristicsEngineeringDiamond-like CarbonCarbon-based MaterialNanomaterialsCh4–ar MixturesGrowth ChemistryChemistryCarbon-based FilmsChemical Vapor Deposition

References

	Year	Citations

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