Thin Solid Films · 2005 · 10 citations · 8 references
Natural SciencesMaterials SciencePhysicsMetrologyOpticsThin FilmsEpitaxial GrowthInterferometryOptical Thin FilmsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsFilm Thickness MeasurementHeterodyne InterferometryOptical ConstantsOptical Thickness MeasurementThin Film Growth MonitoringThin-film Growth MechanismsThin-film Optical Characterization
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In situ monitoring of sputtered zinc oxide films for piezoelectric transducers
N.K. Zayer, R. Greef, Keith D. Rogers et al. · Thin Solid Films · 1999 · 73 citations