Production of multicharged ions in a 2.45 GHz electron cyclotron resonance source directly excited in a circular TE01 mode cavity resonator

Abstract

In order to study the upgrading feasibility of the low frequency electron cyclotron resonance (ECR) plasma by using 2.45 GHz microwaves for multicharged ion sources, we have conducted various experiments in the TAIKO device (Toyama Pref. University). In this article the experimental study concentrates on the production of multicharged ions with respect to a microwave mode, especially, a circular TE01 mode, which is expected to enhance the efficiency of electron cyclotron resonance. The electric field of the circular TE01 mode has only a circumferential component in the same direction as electron cyclotron motion, perpendicular to the magnetic mirror field. We can assign the peak position of the electric field of the standing waves to the ECR zone in the cavity resonator, i.e., the vacuum chamber. We investigated the features of the plasma source in the cavity resonator of the circular TE01 mode microwave directly excited. We described the results of the simulation experimentally, and the design of the new source in detail, preliminary results of the new source, and then relevant discussions.