Formation of Carbon Nanotube Forest over Spin-coated Fe₂O₃Reduced Thin-film by Chemical Vapor Deposition

Abstract

A dense carbon nanotube [CNT] forest was formed by chemical vapor deposition [CVD] using spin-coated iron oxide (Fe2O3) thin-film on Si substrate. The nanoforest contains carbon nanotubes was obtained by feeding a mixture of acetylene, hydrogen and nitrogen [N2:H2: C2H2 = 27: 27: 5 mL/min] for 45 min at 700°C in the CVD chamber. The CNT forest was subjected to analyze the phase, crystalline quality and microstructure using X-ray diffraction, Raman spectroscopy, and scanning electron microscopy [SEM], respectively. The elemental analysis and mapping were also studied using energy dispersive X-ray spectroscopy [EDX]. The morphology, shape and size of the nanotubes were characterized by transmission electron microscopy. The obtained carbon nanotubes were of length 13–14 μm and diameter of 10–100 nm over Fe thin-film coated on Si substrate, which makes this CNT/Fe/Si hybrid material could be a better candidate for field emission applications.