Publication | Open Access
Non‐Electrostatic Diagnostics for Ion Beams
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Citations
22
References
2012
Year
Ion ImplantationEngineeringPhysicsArgon PressuresApplied PhysicsIon BeamsAtomic PhysicsIon Beam PhysicsIon Beam InstrumentationIon BeamInstrumentationParticle Beam PhysicsIon EmissionNon‐electrostatic Diagnostics
Abstract The article reports on non‐electrostatic diagnostics for ion beams. A novel galvanometric force measuring probe is presented, and results are compared with corresponding measurements by a calorimetric technique and using falling microparticles. The target chamber is operated at argon pressures where charge‐exchange collisions are important. It is highlighted that non‐electrostatic methods are sensitive for ions as well as energetic neutral atoms. For the first time, bombardment induced light emission (BLE) from solid targets is proposed as simple beam diagnostic (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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