Deposition of Si-DLC films with high hardness, low stress and high deposition rates - Concepedia

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Deposition of Si-DLC films with high hardness, low stress and high deposition rates

133

Citations

21

References

2000

Year

J. C. Damasceno, S.S. Camargo, F.L. Freire, R. Carius

Surface and Coatings Technology

Materials ScienceMaterials EngineeringEngineeringSilicon On InsulatorSurface ScienceApplied PhysicsHigh HardnessThin FilmsChemical DepositionLow StressChemical Vapor DepositionSi-dlc FilmsThin Film Processing

References

	Year	Citations

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