Identification of Water Molecules in Low Humidity and Possibility of Quantitative Gas Analysis using Porous Silicon Gas Sensor

Abstract

In a previous experiment, it was shown that a gas identification sensor using porous silicon necessitated more than 60% concentration for identification. In the present study, it was shown by means of an experiment using water vapor that the concentration limit for gas identification may be controlled by changing the sensor temperature. In addition, the possibility of quantitative analysis of gas identification in which the sensor temperature is taken as a new parameter was proposed.