Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 12 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsPolymer MaterialsRadiation PhysicsImplant MaterialsIon ImplantationIonization ProcessesRadiation Damage In MaterialsRadiation HardeningRadiation Transport In MatterElectronic Stopping PowerImplantation Through Thin FilmsIon Implantation EffectsPolymer Radiation DamageRadiation DamageRadiation Damage MechanismsRadiation-induced DegradationStopping Characteristics
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Nucleation of damage centres during ion implantation of silicon
L.T. Chadderton · Radiation Effects · 1971 · 105 citations