Properties of pbtio₃, La-modified pbtio₃ and Pb(Zr,Ti)O₃ thin films and their application to infrared detectors

Abstract

Abstract The structure and properties of PbTiO3, La-modified PbTiO3 and Pb(Zr,Ti)O3 ferroelectric thin films and multilayer pyroelectric thin films applied to infrared detectors were investigated. A PbTiO3 thin film with fine crystal grains has low dielectric constant and loss tangent, and its pyroelectric coefficient is 1.6 × 10−8 C/cm−2. K. A multilayer pyroelectric thin film is introduced to reduce thermal loss from the pyroelectric layer to the substrate. A porous SiO2 thin film with very low thermal conductivity was prepared and used as a thermal insulating layer. Experimental results show that the multilayer pyroelectric thin film can improve the pyroelectric response of a thin film detector remarkably at low frequency, and is a promising candidate for infrared detectors.