Publication | Closed Access
Effects of experimental parameters on the physical properties of non-stoichiometric sputtered vanadium nitrides films
19
Citations
8
References
2006
Year
Materials ScienceMaterial AnalysisEngineeringPhysicsSurface ScienceApplied PhysicsExperimental ParametersThin FilmsChemical Vapor DepositionThin Film ProcessingPhysical Properties
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