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Dislocation cross-slip in GaN single crystals under nanoindentation
72
Citations
14
References
2011
Year
Materials EngineeringMaterials ScienceDislocation Cross-slipWide-bandgap SemiconductorEngineeringDislocation InteractionPhysicsNanotechnologyNanoelectronicsApplied PhysicsAluminum Gallium NitrideGan Power DeviceMovement MechanismIndentation Induced DislocationsMicroelectronicsCategoryiii-v SemiconductorDislocation Multiplication
The dislocation multiplication and movement mechanism in GaN single crystals has been studied using nanoindentation and cathodoluminescence. Dislocation loops can multiply and move from plane to plane by cross-slip, thus producing a wide plastic deformation in GaN during indentation. This mechanism is further supported by the remarkable movement of indentation induced dislocations during annealing. Furthermore, the so-called pop-in events, in which the indenter suddenly enters deeper into the material without the application of any additional force, can be better understood by considering the cross-slip mechanism.
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