Publication | Closed Access
Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications
41
Citations
22
References
2006
Year
Materials ScienceCarbon FilmsDiamond-like CarbonEngineeringCarbon-based MaterialElectron-beam LithographyNanomaterialsNanotechnologyNanoelectronicsBeam LithographyApplied PhysicsNanofabricationNanoimprint Lithography ApplicationsNanolithography MethodIon Beam Synthesis
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