Synthesis of nitrogen incorporated carbon films by plasma immersion ion implantation and deposition - Concepedia

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Synthesis of nitrogen incorporated carbon films by plasma immersion ion implantation and deposition

37

Citations

19

References

2004

Year

Feng Wen, Ning Huang, Hongqi Sun, J Wang, Y.X. Leng

Surface and Coatings Technology

Materials ScienceCarbon FilmsChemical EngineeringEngineeringCarbon-based MaterialGas Discharge PlasmaChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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