Publication | Open Access
The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology
123
Citations
7
References
1997
Year
PhotonicsPhotonic SensorEngineeringDevice IntegrationSilicon TechnologyMicrofabricationMach-zehnder Waveguide ImmunosensorBiomedical EngineeringPhotonic Integrated CircuitMicroelectronicsSensor TechnologyPlanar Waveguide Sensor
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